CHEVALIER CELINE Ingénieure de Recherche CNRS - Responsable Centrale de Micro et Nanofabircation Doua Laboratory : NanoLyon Show phone Send an email Contact the manager 04 72 44 62 82 Email Name * Company * Email address * Subject * Message * * Your email is sent directly to the contact, a copy of this email will be sent to This email address is being protected from spambots. You need JavaScript enabled to view it.. Cancel Send Responsable des ressources All Lithography, printing Materials preparation Microscopy Synthesis Chemical/Materials Volume/Surface Measures Reactive ion etching system NGP80 Lithography, printing > Dry etching RIE system NE110 Lithography, printing > Dry etching Laser-UV lithography µPG101 Lithography, printing > Lithography > Laser diode 375nm step-and-repeat nanoimprint lithography frame SET NPS300 Lithography, printing > Lithography UV Litography EVG620 Lithography, printing > Lithography > Hg 375nm lamp UV-LED Lithography UVKUB-2 Lithography, printing > Lithography > UV Led UV nanosecond laser Materials preparation > Laser > Ablation Metallizer Cressincton Materials preparation > Sputter coater SEM TESCAN Mira3 1 Usage modeCathodo-luminescent Microscopy > Electronic > Scanning > FEG AC450 sputtering system Synthesis Chemical/Materials > Materials > Cathodic Sputtering ALD Cambridge-Nanotec Synthesis Chemical/Materials > Materials > Thin film deposition > ALD Ebeam evaoprator EVA601 Synthesis Chemical/Materials > Materials > Evaporation > EBPVD Evaporator Edwards Auto-306 Synthesis Chemical/Materials > Materials > Evaporation > EBPVD Evaporator EVA300 Synthesis Chemical/Materials > Materials > Evaporation > EBPVD PE-CVD Synthesis Chemical/Materials > Materials > Thin film deposition Vegatec Synthesis Chemical/Materials > Materials Profilometer Dektak 150 Volume/Surface Measures > Profilometry > Stylet Profilometer ECV (WEP CV21) Volume/Surface Measures > Profilometry > Electro-chemical