RIE system ICP
Samples: 10 et 200 mm. Reactive gaz : Cl2/H2/Ar/SF6/CHF3/O2/N2
ICP Coil (13.56 MHz, 100 à 1200 W). RF Cathod (13.56 MHz, 600 W) -Temperatire range [ -30°C ;+250°C ]. End point: interferometer @ 670 nm.
Plasma range [0.002 mbar; 0.1 mbar].
Equipment located at Ecole Centrale de Lyon à Ecully (INL-Nanolyon Bâtiment F7)
Contact Task Facility Manager (TFM)
04 72 44 62 82
Depending structure
The goal of INL is to encourage world-leading multidisciplinary research in the areas of micro and nanotechnologies and their applications. The pioneering research undertaken at the Institute ranges from materials and technology to devices and systems, thus enabling the emergence of dedicated technologies. The Institute is supported in its work by the Nanolyon Technology Platform.
Other's Laboratory/Plateforme
Laboratory : NanoLyon
Federation :
FRAMA, C2I@L
Lab tutorship :
UCBL-CNRS-INSA-ECL-CPE
1 rue E. Fermi
Bâtiment Irène Joliot Curie
69622 Villeurbanne
Continuous education :
Access with light support :
Open to academic :
Open to enterprises :
