Ebeam evaoprator EVA601
Synthesis Chemical/Materials > Materials > Evaporation > EBPVD
Sample size: from cm² to 4'' wafers
Evaporated Materials : Al - Ti - Pt - Ag
Contact:
Contact Task Facility Manager (TFM)
04 72 44 62 82
Depending structure
The goal of INL is to encourage world-leading multidisciplinary research in the areas of micro and nanotechnologies and their applications. The pioneering research undertaken at the Institute ranges from materials and technology to devices and systems, thus enabling the emergence of dedicated technologies. The Institute is supported in its work by the Nanolyon Technology Platform.
Other's Laboratory/Plateforme
Laboratory : NanoLyon
Depending structure : INL
Federation :
Lab tutorship :
Federation :
FRAMA, C2I@L
Lab tutorship :
UCBL-CNRS-INSA-ECL-CPE
1 rue E. Fermi
Bâtiment Irène Joliot Curie
69622 Villeurbanne
Full support : 
Continuous education :
Access with light support :
Open to academic :
Open to enterprises :
Continuous education :
Access with light support :
Open to academic :
Open to enterprises :
