Microfabrication room
Lithography, printing > Lithography > UV Led > Air plasma > prototype profile measurement
Photolithography for microfluidic systems, integrated optical circuits and surface micro-structuring. Wafer etching
Plasma cleaning and activation of nanoscale surfaces at room temperature
Prototype profile measurement by tracing
Equipment:
Insulator-Masking UV-KUB 2: 365nm LED source, continuous or pulsed mode, resins on wafers
Harrick PDC-002 Plasma Cleaner: ionized air, plasma production, ozone oxide
Dektak 3030 profilometer: X scan: 50 µm to 50mm; Z scan: 100 A - 131 µm
SpinnerSPS-SPIN150: resin deposition with or without suction
Fume Hood / Chemical cabinet / Horizontal flow hood
Contact Task Facility Manager (TFM)
0472186112
Depending structure
Laboratoire Ampère
36, avenue Guy de CollongueBâtiment H9
69134 Ecully Cedex
04 7218 6099
infos : Website
The Laboratory is structured into 3 Scientific Departments :
Electrical Energy (EE): create and optimize devices for transporting, distributing and converting electrical energy, taking into account their environments
Bio-Engineering (BIO): bring out fundamental concepts, methods and applications in bioengineering.
Automation for Systems Engineering (AIS): development of methodologies and tools aimed at optimizing and controlling the dynamic behavior of systems
Keywords :
Electrical Engineering Materials, Power Electronics, High Voltage, Electromagnetic Compatibility, Electromagnetic Modeling, Electrical Energy Storage Systems
Control-command, Mechatronics, Fluid power, Medical robotics, Diagnostics and operating safety
Gene Transfers and Bacterial Adaptation, Ecologi
Other's Laboratory/Plateforme
Laboratory : Plateau technique Bioingénierie
Federation :
BioEnvis
Lab tutorship :
ECL/INSA/UCBL/CNRS
36 Avenue Guy de Collongue
Bâtiment H9
69134 Ecully
Continuous education :
Access with light support :
Open to academic :
Open to enterprises :
