IBS deposition system - Spector model (VEECO) - Oxides
- Nitrides
- Up to 20 cm
- Oxides
- Nitrides
- Up to 20 cm
Synthesis Chemical/Materials > Materials > Thin film deposition > Ion SputteringThin film deposition
IBS vacuum deposition system able to coat large components up to 20 cm in diameter. Deposition of oxide, nitride (SiO2, HfO2, Ta2O5, Si3N4... ). Realizations of any type of optical components (mirrors, antireflections, dichroic ...)
Contact Task Facility Manager (TFM)
0472432668
Depending structure
IPNL
4 Rue Enrico FermiBât; Dirac - Campus de la DOUA
69622 Villeurbanne
0472447996
infos : Website
Other's Laboratory/Plateforme
Laboratory : Laboratoire Matériaux Avancés
Depending structure : IPNL
Federation :
Lab tutorship :
Federation :
FRAMA
Lab tutorship :
CNRS/IN2P3 - UCBL
7 Avenue Pierre de Coubertin
Bâtiment Virgo - - Campus de la Doua
69622 Villeurbanne
Full support : 
Continuous education :
Access with light support :
Open to academic :
Open to enterprises :
Continuous education :
Access with light support :
Open to academic :
Open to enterprises :
